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Jan 01, 2018· Authors discuss how to create the power supply for MEMS/NEMS devices, based on porous SiC/Si structure, which are tested to be used as the betadecay energy converters of radioactive C14 into electrical energy. This is based on the silicon carbide obtaining by selforganizing mono 3CSiC endotaxy on the Si substrate.
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Keywords : Porous silicon, MEMS INTRODUCTION AND HISTORY OF POROUS SILICON Porous silicon (PSi) has been subject of intensive investigations over the last decade. The potential of the material for MEMS applications has been underestimated for a long time and it should be considered that the discovery of PSi by
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SiLiMiXT is a company focused on the production of porous silicon (PSi) materials for RD and industrial applications. SiLiMiXT development also of PSi production equipment and technological transfer in association with the equipment manufacturer LAY CONCEPT.
First, we have grown transparent and amorphous nanocolumns (NC) of TiO2, SiO2 or WO3 at room temperature by GAPVD on quartz substrates and silicon. The glancing geometry produces films with a tilted columnar microstructure. A feature of these films is that they are very porous.
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